Excimer lasers—40 never looked better

The first commercial excimer laser was introduced 40 years ago by Lambda Physik (now Coherent; Santa Clara, CA). Interestingly, its developers— Bernd Steyer and Dirk Basting—were both chemists whose main goal was to develop a light source for photochemistry and dye laser pumping. As soon as excimer lasers entered the market, Lambda Physik began to investigate other possible uses for a powerful source of short ultraviolet (UV) light. While most of the original applications for excimers can largely be relegated to history, many others have evolved. It is fair to say that few other laser technologies have had a greater impact on our daily life than excimers. Laserassisted in situ keratomileusis (LASIK), photolithography, and display production are three primary applications that illustrate the unique properties of the excimer laser that continue to ensure its legacy as a key enabling technology.